Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Ben-ming Benjamin Tsai, Prashant Aji, Michael Gasvoda, Stanley Stokowski +5 more | 2017-05-09 |
| 8451440 | Apparatus for the optical inspection of wafers | Kurt Hahn, Roland Hedrich, Gerhard Hoppen, Lambert Danner, Albert Kreh +4 more | 2013-05-28 |
| 8089622 | Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers | Andreas Birkner, Michael Hofmann | 2012-01-03 |
| 7375792 | Apparatus for measuring feature widths on masks for the semiconductor industry | Frank Hillmann, Gerd Scheuring, Hans-Jürgen Brueck | 2008-05-20 |
| 7268867 | Apparatus and method for inspecting a semiconductor component | Thomas Krieg | 2007-09-11 |
| 6624930 | Illumination device for a DUV microscope and DUV microscope | Lambert Danner, Frank Eisenkrämer, Michael Veith, Martin Osterfeld | 2003-09-23 |
| 5440422 | Method for manufacturing ultraviolet microscope dry objectives and microscope objectives manufactured in accordance with this method | — | 1995-08-08 |