Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7460962 | Method for an automatic optical measuring of an OPC structure | Hans-Juergen Brueck | 2008-12-02 |
| 7375792 | Apparatus for measuring feature widths on masks for the semiconductor industry | Wolfgang Vollrath, Frank Hillmann, Hans-Jürgen Brueck | 2008-05-20 |