Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7375792 | Apparatus for measuring feature widths on masks for the semiconductor industry | Wolfgang Vollrath, Frank Hillmann, Gerd Scheuring | 2008-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7375792 | Apparatus for measuring feature widths on masks for the semiconductor industry | Wolfgang Vollrath, Frank Hillmann, Gerd Scheuring | 2008-05-20 |