Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8451440 | Apparatus for the optical inspection of wafers | Kurt Hahn, Roland Hedrich, Gerhard Hoppen, Lambert Danner, Wolfgang Vollrath +4 more | 2013-05-28 |
| 7602481 | Method and apparatus for inspecting a surface | — | 2009-10-13 |
| 7460219 | Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset | Paul-Gottfried Jung, Henning Backhauss | 2008-12-02 |
| 7424393 | Wafer inspection device | Michael Halama, Guenter Schmidt | 2008-09-09 |
| 7327450 | Apparatus for inspection of a wafer | Henning Backhauss | 2008-02-05 |
| 7307713 | Apparatus and method for inspection of a wafer | Henning Backhauss | 2007-12-11 |
| 7292328 | Method for inspection of a wafer | Henning Backhauss, Detlef Michelsson | 2007-11-06 |
| 7265823 | System for the detection of macrodefects | Henning Backhauss, Rene Schenck | 2007-09-04 |
| 7248354 | Apparatus for inspection of a wafer | Henning Backhauss | 2007-07-24 |
| 7224446 | Apparatus, method, and computer program for wafer inspection | Henning Backhauss | 2007-05-29 |
| 7180585 | Apparatus for wafer inspection | Henning Backhauss | 2007-02-20 |
| 6875972 | Autofocus module for microscope-based systems | — | 2005-04-05 |
| 6812446 | Autofocus module for microscope-based systems | — | 2004-11-02 |