Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8451440 | Apparatus for the optical inspection of wafers | Kurt Hahn, Roland Hedrich, Gerhard Hoppen, Lambert Danner, Albert Kreh +4 more | 2013-05-28 |
| 7477370 | Method of detecting incomplete edge bead removal from a disk-like object | Detlef Michelsson, Gert Weniger | 2009-01-13 |
| 7460219 | Method for optically inspecting a wafer by sequentially illuminating with bright and dark field light beams wherein the images from the bright and dark field illuminated regions are spatially offset | Paul-Gottfried Jung, Albert Kreh | 2008-12-02 |
| 7327450 | Apparatus for inspection of a wafer | Albert Kreh | 2008-02-05 |
| 7307713 | Apparatus and method for inspection of a wafer | Albert Kreh | 2007-12-11 |
| 7292328 | Method for inspection of a wafer | Albert Kreh, Detlef Michelsson | 2007-11-06 |
| 7265823 | System for the detection of macrodefects | Albert Kreh, Rene Schenck | 2007-09-04 |
| 7248354 | Apparatus for inspection of a wafer | Albert Kreh | 2007-07-24 |
| 7224446 | Apparatus, method, and computer program for wafer inspection | Albert Kreh | 2007-05-29 |
| 7180585 | Apparatus for wafer inspection | Albert Kreh | 2007-02-20 |
| 5778127 | Optical transceiver and filler composition | Patrick Gilliland, Daniel S. Poplawski | 1998-07-07 |
| 5528408 | Small footprint optoelectronic transceiver with laser | James W. McGinley, Patrick Gilliland, Allan L. Pallarito, Rou Farhadieh | 1996-06-18 |