Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11182892 | Periodic semiconductor device misregistration metrology system and method | Yoel Feler | 2021-11-23 |
| 8705837 | Method for inspection and detection of defects on surfaces of disc-shaped objects and computer system with a software product for carrying out the method | Daniel Skiera | 2014-04-22 |
| 8264534 | Method and apparatus for processing the image data of the surface of a wafer recorded by at least one camera | — | 2012-09-11 |
| 8200003 | Method for the optical inspection and visualization of optical measuring values obtained from disk-like objects | — | 2012-06-12 |
| 8200004 | Method for inspecting a surface of a wafer with regions of different detection sensitivity | Joerg Richter | 2012-06-12 |
| 7973931 | Method for determining the position of the edge bead removal line of a disk-like object | Guido Dietzler | 2011-07-05 |
| 7657077 | Detecting defects by three-way die-to-die comparison with false majority determination | Steffen Gerlach, Bernd Jungmann | 2010-02-02 |
| 7477370 | Method of detecting incomplete edge bead removal from a disk-like object | Henning Backhauss, Gert Weniger | 2009-01-13 |
| 7417719 | Method, device and software for the optical inspection of a semi-conductor substrate | — | 2008-08-26 |
| 7292328 | Method for inspection of a wafer | Albert Kreh, Henning Backhauss | 2007-11-06 |
| 7193699 | Method and apparatus for scanning a semiconductor wafer | — | 2007-03-20 |