Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8125653 | Apparatus and method for the determination of the position of a disk-shaped object | Ulrich Pohlmann, Frank Rennicke | 2012-02-28 |
| 7477370 | Method of detecting incomplete edge bead removal from a disk-like object | Detlef Michelsson, Henning Backhauss | 2009-01-13 |
| 7041952 | Method for automatic focusing an imaging optical system on the surface of a sample | Thomas Iffland, Joachim Wienecke | 2006-05-09 |