Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12063745 | Method for processing substrates, in particular wafers, masks or flat panel displays, with a semi-conductor industry machine | — | 2024-08-13 |
| 10322919 | Maintenance apparatus | Simon SCHADT, Arndt Evers | 2019-06-18 |
| 8089622 | Device and method for evaluating defects in the edge area of a wafer and use of the device in inspection system for wafers | Michael Hofmann, Wolfgang Vollrath | 2012-01-03 |
| 7028565 | Method and arrangement for transporting and inspecting semiconductor substrates | Frank Bernhardt, Knut Hiltawski | 2006-04-18 |
| 6962471 | Substrate conveying module and system made up of substrate conveying module and workstation | Knut Hiltawski, Karsten Urban, Joachim Wienecke | 2005-11-08 |
| 6845174 | Arrangement and method for the identification of substrates | Dominik Grau, Knut Hiltawski, Frank Bernhardt | 2005-01-18 |
| 6789436 | Method and arrangement for transporting and inspecting semiconductor substrates | Frank Bernhardt, Knut Hiltawski | 2004-09-14 |
| 6736582 | Device for manipulating an object for loading and unloading a clean room | Andreas Mages, Alfred Schulz, Klaus Schultz | 2004-05-18 |
| 6553850 | Method and arrangement for transporting and inspecting semiconductor substrates | Frank Bernhardt, Knut Hiltawski | 2003-04-29 |
| 5636724 | Device for transferring a transport object between two end positions | Werner Scheler, Juergen Graefe, Andreas Mages, Erich Adler | 1997-06-10 |
| 5605428 | Device for indexing magazine compartments and wafer-shaped objects in the compartments | Berndt Lahne, Klaus Schultz | 1997-02-25 |
| 4406790 | Method for operating a biological sewage purification plant | — | 1983-09-27 |