Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7109509 | Device for the detection of substrates stacked with a specific spacing | Ulysses Gilchrist, Louise S. Barriss, Hagen Raue, Manfred Heinze, Joachim Konig +1 more | 2006-09-19 |
| 5807062 | Arrangement for handling wafer-shaped objects | Klaus Schultz, Harald Beckert, Manfred Heinze | 1998-09-15 |
| 5655869 | Device for coupling loading and unloading devices with semiconductor processing machines | Werner Scheler, Andreas Mages, Uwe Michl, Eberhard Gemkow, Alfred Schulz | 1997-08-12 |
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Klaus Schultz, Werner Scheler, Michael Heitmann, Axel Gaglin | 1997-07-01 |
| 5605428 | Device for indexing magazine compartments and wafer-shaped objects in the compartments | Andreas Birkner, Klaus Schultz | 1997-02-25 |