Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9106807 | Device for noncontact determination of edge profile at a thin disk-shaped object | Thomas W. Becker, Frank Richter, Bernd Gey | 2015-08-11 |
| 5642978 | Device for handling disk-shaped objects in a handling plane of a local clean room | Berndt Lahne, Klaus Schultz, Werner Scheler, Michael Heitmann | 1997-07-01 |