Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10698318 | Method and device for characterizing a mask for microlithography | Holger Seitz, Ute Buttgereit, Thomas Thaler, Thomas Frank, Ulrich Matejka +2 more | 2020-06-30 |
| 6845174 | Arrangement and method for the identification of substrates | Andreas Birkner, Knut Hiltawski, Frank Bernhardt | 2005-01-18 |