Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11366069 | Simultaneous multi-directional laser wafer inspection | Guoheng Zhao, Sheng Liu | 2022-06-21 |
| 10739275 | Simultaneous multi-directional laser wafer inspection | Guoheng Zhao, Sheng Liu | 2020-08-11 |
| 9645097 | In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning | Lena Nicolaides, Prashant Aji, Michael Gasvoda, Stanley Stokowski, Guoheng Zhao +5 more | 2017-05-09 |
| 7557921 | Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools | Michael Adel, Moshe E. Preil, Kevin P. Monahan, Christopher F. Bevis, Mark Ghinovker | 2009-07-07 |
| 7375810 | Overlay error detection | Mehrdad Nikoonahad, Guoheng Zhao, Andrei V. Shchegrov | 2008-05-20 |
| 7009704 | Overlay error detection | Mehrdad Nikoonahad, Guoheng Zhao, Andrei V. Shchegrov | 2006-03-07 |