Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7740916 | Method for the protection of extreme ultraviolet lithography optics | Wayne M. Clift, Leonard E. Klebanoff | 2010-06-22 |
| 7147722 | Method for in-situ cleaning of carbon contaminated surfaces | Leonard E. Klebanoff, Samuel Graham, Jr. | 2006-12-12 |
| 6772776 | Apparatus for in situ cleaning of carbon contaminated surfaces | Leonard E. Klebanoff, Samuel Graham, Jr. | 2004-08-10 |