PG

Philip Grunow

EL Euv Llc.: 3 patents #17 of 57Top 30%
Overall (All Time): #1,569,667 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7740916 Method for the protection of extreme ultraviolet lithography optics Wayne M. Clift, Leonard E. Klebanoff 2010-06-22
7147722 Method for in-situ cleaning of carbon contaminated surfaces Leonard E. Klebanoff, Samuel Graham, Jr. 2006-12-12
6772776 Apparatus for in situ cleaning of carbon contaminated surfaces Leonard E. Klebanoff, Samuel Graham, Jr. 2004-08-10