Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7740916 | Method for the protection of extreme ultraviolet lithography optics | Philip Grunow, Leonard E. Klebanoff | 2010-06-22 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7740916 | Method for the protection of extreme ultraviolet lithography optics | Philip Grunow, Leonard E. Klebanoff | 2010-06-22 |