Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664554 | Self-cleaning optic for extreme ultraviolet lithography | Leonard E. Klebanoff | 2003-12-16 |
| 6533952 | Mitigation of radiation induced surface contamination | Leonard E. Klebanoff | 2003-03-18 |
| 6492067 | Removable pellicle for lithographic mask protection and handling | Leonard E. Klebanoff, Daniel J. Rader, Scott D. Hector, Khanh B. Nguyen | 2002-12-10 |
| 6060224 | Method for maskless lithography | William C. Sweatt | 2000-05-09 |
| 5870176 | Maskless lithography | William C. Sweatt | 1999-02-09 |
| 4538068 | Manipulator having thermally conductive rotary joint for transferring heat from a test specimen | Steven J. Haney, Norman F. Toly | 1985-08-27 |