| 7195354 |
Adaptive ophthalmologic system |
Scot S. Olivier, Charles A. Thompson, JR., Brian J. Bauman, Steve M. Jones, Jr., Don T. Gavel +2 more |
2007-03-27 |
| 6900952 |
System and method for reproducibly mounting an optical element |
Stephen Eisenbies |
2005-05-31 |
| 6734422 |
Portable outgas detection apparatus |
Michael Malinowski |
2004-05-11 |
| 6642995 |
Mask-to-wafer alignment system |
William C. Sweatt, Daniel A. Tichenor |
2003-11-04 |
| 6561486 |
Motorized support jack |
Donald Joe Herron |
2003-05-13 |
| 6549264 |
Extreme-UV lithography vacuum chamber zone seal |
Donald Joe Herron, Leonard E. Klebanoff, William C. Replogle |
2003-04-15 |
| 6545745 |
Extreme-UV lithography vacuum chamber zone seal |
Donald Joe Herron, Leonard E. Klebanoff, William C. Replogle |
2003-04-08 |
| 6333775 |
Extreme-UV lithography vacuum chamber zone seal |
Donald Joe Herron, Leonard E. Klebanoff, William C. Replogle |
2001-12-25 |
| 6328282 |
Motorized support jack |
Donald Joe Herron |
2001-12-11 |
| 6192897 |
Apparatus and method for in-situ cleaning of resist outgassing windows |
Leonard E. Klebanoff |
2001-02-27 |
| 6031598 |
Extreme ultraviolet lithography machine |
Daniel A. Tichenor, Glenn D. Kubiak, Donald W. Sweeney |
2000-02-29 |
| 4538068 |
Manipulator having thermally conductive rotary joint for transferring heat from a test specimen |
Richard H. Stulen, Norman F. Toly |
1985-08-27 |
