Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7239443 | Condenser optic with sacrificial reflective surface | Glenn D. Kubiak, Sung-Hun Lee | 2007-07-03 |
| 7081992 | Condenser optic with sacrificial reflective surface | Glenn D. Kubiak, Sang Hun Lee | 2006-07-25 |
| 6815129 | Compensation of flare-induced CD changes EUVL | John E. Bjorkholm, Daniel G. Stearns, Eric M. Gullikson, Scott D. Hector | 2004-11-09 |
| 6642995 | Mask-to-wafer alignment system | William C. Sweatt, Steven J. Haney | 2003-11-04 |
| 6469827 | Diffraction spectral filter for use in extreme-UV lithography condenser | William C. Sweatt, Luis J. Bernardez | 2002-10-22 |
| 6229871 | Projection lithography with distortion compensation using reticle chuck contouring | — | 2001-05-08 |
| 6031598 | Extreme ultraviolet lithography machine | Glenn D. Kubiak, Steven J. Haney, Donald W. Sweeney | 2000-02-29 |
| 4441816 | Optical double-slit particle measuring system | Kenneth R. Hencken, James Wang | 1984-04-10 |