Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6898781 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography | Vivek Singh, Francisco Leon | 2005-05-24 |
| 6815129 | Compensation of flare-induced CD changes EUVL | Daniel G. Stearns, Eric M. Gullikson, Daniel A. Tichenor, Scott D. Hector | 2004-11-09 |
| 6625802 | Method for modifying a chip layout to minimize within-die CD variations caused by flare variations in EUV lithography | Vivek Singh, Francisco Leon | 2003-09-23 |
| 4518456 | Light induced etching of InP by aqueous solutions of H.sub.3 PO.sub.4 | — | 1985-05-21 |
| 4410239 | Nonlinear optical device using self-trapping of light | Alexander E. Kaplan, Peter W. Smith, Walter J. Tomlinson, III | 1983-10-18 |
| 4375033 | Universal detector for atomic and molecular beams | Jonathan C. White | 1983-02-22 |
| 4327288 | Method for focusing neutral atoms, molecules and ions | Arthur Ashkin, Richard R. Freeman, David Pearson | 1982-04-27 |
| 4303840 | Single beam second harmonic generation in isotropic media | Richard R. Freeman, Richard L. Panock, William E. Cooke | 1981-12-01 |