Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8331027 | Ultra-high density diffraction grating | Howard A. Padmore, Dmytro L. Voronov, Rossana Cambie, Valeriy V. Yashchuk | 2012-12-11 |
| 6815129 | Compensation of flare-induced CD changes EUVL | John E. Bjorkholm, Daniel G. Stearns, Daniel A. Tichenor, Scott D. Hector | 2004-11-09 |