Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6744493 | In-vacuum exposure shutter | Terry A. Johnson, William C. Replogle | 2004-06-01 |
| 6469827 | Diffraction spectral filter for use in extreme-UV lithography condenser | William C. Sweatt, Daniel A. Tichenor | 2002-10-22 |
| 6011267 | Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources | Glenn D. Kubiak | 2000-01-04 |