Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7239443 | Condenser optic with sacrificial reflective surface | Daniel A. Tichenor, Sung-Hun Lee | 2007-07-03 |
| 7081992 | Condenser optic with sacrificial reflective surface | Daniel A. Tichenor, Sang Hun Lee | 2006-07-25 |
| 6563907 | Radiation source with shaped emission | William C. Sweatt | 2003-05-13 |
| 6396068 | Illumination system having a plurality of movable sources | William C. Sweatt | 2002-05-28 |
| 6285737 | Condenser for extreme-UV lithography with discharge source | William C. Sweatt | 2001-09-04 |
| 6031598 | Extreme ultraviolet lithography machine | Daniel A. Tichenor, Steven J. Haney, Donald W. Sweeney | 2000-02-29 |
| 6011267 | Erosion resistant nozzles for laser plasma extreme ultraviolet (EUV) sources | Luis J. Bernardez | 2000-01-04 |
| 6007963 | Method for extreme ultraviolet lithography | T. E. Felter | 1999-12-28 |
| 4330360 | Molecular beam deposition technique using gaseous sources of group V elements | Morton B. Panish | 1982-05-18 |