Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119384 | Hermetic sealing of a nonlinear crystal for use in a laser system | Rajeev Patil, David Ramirez, Yevgeniy Churin | 2021-09-14 |
| 6744493 | In-vacuum exposure shutter | Terry A. Johnson, Luis J. Bernardez | 2004-06-01 |
| 6549264 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, Leonard E. Klebanoff | 2003-04-15 |
| 6545745 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, Leonard E. Klebanoff | 2003-04-08 |
| 6333775 | Extreme-UV lithography vacuum chamber zone seal | Steven J. Haney, Donald Joe Herron, Leonard E. Klebanoff | 2001-12-25 |
| 6225027 | Extreme-UV lithography system | William C. Sweatt | 2001-05-01 |