Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9156068 | Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation | Leonard E. Klebanoff, Gildardo Delgado, Karl R. Umstadter, Elena Starodub, Guorong V. Zhuang | 2015-10-13 |