Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332570 | Lithographic system provided with a deflection apparatus for changing a trajectory of particulate debris | Ronald Peter Albright, Kursat Bal, Vadim Yevgenyevich Banine, Richard Joseph Bruls, Sjoerd Frans DE VRIES +13 more | 2025-06-17 |
| 10128016 | EUV element having barrier to hydrogen transport | — | 2018-11-13 |
| 9268031 | Advanced debris mitigation of EUV light source | — | 2016-02-23 |
| 9156068 | Methods and apparatus for cleaning objects in a chamber of an optical instrument by generating reactive ions using photon radiation | Leonard E. Klebanoff, Gildardo Delgado, Jeromy T. Hollenshead, Elena Starodub, Guorong V. Zhuang | 2015-10-13 |
| 9155180 | System and method of simultaneously fueling and mitigating debris for a plasma-based illumination source | — | 2015-10-06 |
| 8917432 | Multiplexing EUV sources in reticle inspection | Daniel Wack, Daimian Wang, Ed Ma, Frank Chilese | 2014-12-23 |