| 12353211 |
System for movement outside of sensor field of view by an autonomous mobile device |
Yue Hu, Jong Jin Park, Roopesh Athipatla Pattabhi, Jingyu Qiao, Changsheng Shen |
2025-07-08 |
| 11989026 |
Speed control system for an autonomous mobile device |
Chen Wang, Lei Zhu, Miro Yakov Shverdin, Yue Hu, Isabella Talley Lewis +1 more |
2024-05-21 |
| 11960288 |
System for path planning in areas outside of sensor field of view by an autonomous mobile device |
Yue Hu, Jong Jin Park, Roopesh Athipatla Pattabhi, Jingyu Qiao, Changsheng Shen |
2024-04-16 |
| 10782616 |
Automatic selection of metrology target measurement recipes |
Shengrui Zhang, Chi-Hsiang Fan |
2020-09-22 |
| 10691029 |
Substrate measurement recipe configuration to improve device matching |
Ning GU, Jen-Shiang Wang |
2020-06-23 |
| 9625810 |
Source multiplexing illumination for mask inspection |
Daniel Wack, Damon F. Kvamme, Tao-Yi Fu |
2017-04-18 |
| 9453801 |
Photoemission monitoring of EUV mirror and mask surface contamination in actinic EUV systems |
Li-Ping Wang, Yanwei Liu, Alan Aindow |
2016-09-27 |
| 9348214 |
Spectral purity filter and light monitor for an EUV reticle inspection system |
Li-Ping Wang, Frank Chilese, David Alles |
2016-05-24 |
| 9151718 |
Illumination system with time multiplexed sources for reticle inspection |
Tao-Yi Fu, Damon F. Kvamme |
2015-10-06 |
| 9151881 |
Phase grating for mask inspection system |
Oleg Khodykin, Daniel Wack, Li-Ping Wang, Yanwei Liu |
2015-10-06 |
| 8916831 |
EUV actinic reticle inspection system using imaging sensor with thin film spectral purity filter coating |
— |
2014-12-23 |
| 8917432 |
Multiplexing EUV sources in reticle inspection |
Daniel Wack, Karl R. Umstadter, Ed Ma, Frank Chilese |
2014-12-23 |