Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11568123 | Method for determining an etch profile of a layer of a wafer for a simulation system | Feng Chen, Wangshi Zhao, Youping Zhang | 2023-01-31 |
| 11392044 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Hakki Ergün Cekli +3 more | 2022-07-19 |
| 11281113 | Method for determining stack configuration of substrate | Danying LI, Abdalmohsen Elmalk, Youping Zhang, Jay Jianhui Chen, Kui Huang | 2022-03-22 |
| 10802409 | Metrology method and apparatus, substrate, lithographic method and associated computer product | Maurits Van Der Schaar, Youping Zhang | 2020-10-13 |
| 10782616 | Automatic selection of metrology target measurement recipes | Daimian Wang, Shengrui Zhang | 2020-09-22 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Masashi Ishibashi, Hakki Ergün Cekli +3 more | 2020-03-03 |