Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11774862 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara, Rizvi Rahman +3 more | 2023-10-03 |
| 11392044 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Chi-Hsiang Fan, Hakki Ergün Cekli +3 more | 2022-07-19 |
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Wendy Johanna Martina Van De Ven, Willem Seine Christian Roelofs, Elliott Gerard McNamara, Rizvi Rahman +3 more | 2021-11-16 |
| 10578980 | Method of determining a position of a feature | Ralph Timotheus Huijgen, Marc Jurian Kea, Marcel Theodorus Maria Van Kessel, Chi-Hsiang Fan, Hakki Ergün Cekli +3 more | 2020-03-03 |
| 10545410 | Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Hakki Ergün Cekli, Leon Paul VAN DIJK, Richard Johannes Franciscus Van Haren, Xing Lan Liu, Reiner Maria Jungblut +2 more | 2020-01-28 |