Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11782349 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-10-10 |
| 11774862 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Elliott Gerard McNamara, Rizvi Rahman +3 more | 2023-10-03 |
| 11592753 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2023-02-28 |
| 11327407 | Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2022-05-10 |
| 11175591 | Method of obtaining measurements, apparatus for performing a process step, and metrology apparatus | Hakki Ergün Cekli, Masashi Ishibashi, Wendy Johanna Martina Van De Ven, Elliott Gerard McNamara, Rizvi Rahman +3 more | 2021-11-16 |
| 11126093 | Focus and overlay improvement by modifying a patterning device | Richard Johannes Franciscus Van Haren, Reiner Maria Jungblut, Leon Paul VAN DIJK, Wim Tjibbo Tel, Stefan Hunsche +1 more | 2021-09-21 |
| 11029610 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more | 2021-06-08 |
| 10962887 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2021-03-30 |
| 10877381 | Methods of determining corrections for a patterning process | Weitian Kou, Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer +8 more | 2020-12-29 |
| 10527958 | Lithographic method | Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more | 2020-01-07 |