| 12124179 |
Method of wafer alignment using at resolution metrology on product features |
Wim Tjibbo Tel, Hermanus Adrianus DILLEN, Marc Jurian Kea, Roy Werkman |
2024-10-22 |
| 12044981 |
Method and apparatus for optimization of lithographic process |
Marc Hauptmann, Everhardus Cornelis Mos, Alexander Ypma, Michiel Kupers, Hyunwoo Yu +1 more |
2024-07-23 |
| 11782349 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more |
2023-10-10 |
| 11592753 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more |
2023-02-28 |
| 11448973 |
Computational metrology based correction and control |
Manouk RIJPSTRA, Cornelis Johannes Henricus LAMBREGTS, Wim Tjibbo Tel, Sarathi ROY, Cédric Désiré Grouwstra +3 more |
2022-09-20 |
| 11327407 |
Methods of determining corrections for a patterning process, device manufacturing method, control system for a lithographic apparatus and lithographic apparatus |
Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more |
2022-05-10 |
| 11099487 |
Method and apparatus for optimization of lithographic process |
Marc Hauptmann, Everhardus Cornelis Mos, Alexander Ypma, Michiel Kupers, Hyunwoo Yu +1 more |
2021-08-24 |
| 11054813 |
Method and apparatus for controlling an industrial process using product grouping |
Alexander Ypma, David Deckers, Franciscus Godefridus Casper Bijnen, Richard Johannes Franciscus Van Haren |
2021-07-06 |
| 11029610 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Ahmet Koray Erdamar, Loek Johannes Petrus Verhees +11 more |
2021-06-08 |
| 10962887 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more |
2021-03-30 |
| 10877381 |
Methods of determining corrections for a patterning process |
Alexander Ypma, Marc Hauptmann, Michiel Kupers, Lydia Marianna Vergaij-Huizer, Erik Johannes Maria Wallerbos +8 more |
2020-12-29 |
| 10527958 |
Lithographic method |
Patricius Aloysius Jacobus Tinnemans, Edo Maria Hulsebos, Henricus Johannes Lambertus Megens, Sudharshanan Raghunathan, Boris Menchtchikov +13 more |
2020-01-07 |