Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466360 | Enhanced cathodic ARC source for ARC plasma deposition | Boris L. Druz, Yuriy N. Yevtukhov, Sandeep Kohli, Xingjie Fang | 2022-10-11 |
| 9206500 | Method and apparatus for surface processing of a substrate using an energetic particle beam | Boris L. Druz, Roger P. Fremgen, Alan V. Hayes, Robert Krause, Ira Reiss +1 more | 2015-12-08 |
| 8835869 | Ion sources and methods for generating an ion beam with controllable ion current density distribution | Rustam Yevtukhov, Boris L. Druz, Alan V. Hayes | 2014-09-16 |
| 8158016 | Methods of operating an electromagnet of an ion source | Alan V. Hayes, Rustam Yevtukhov, Boris L. Druz | 2012-04-17 |
| 7879201 | Method and apparatus for surface processing of a substrate | Boris L. Druz, Hariharakeshave S. Hegde, Alan V. Hayes, Emmanuel Lakios | 2011-02-01 |
| 7557362 | Ion sources and methods for generating an ion beam with a controllable ion current density distribution | Rustam Yevtukhov, Alan V. Hayes, Boris L. Druz | 2009-07-07 |
| 7414355 | Charged particle beam extraction and formation apparatus | Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch | 2008-08-19 |
| 7183716 | Charged particle source and operation thereof | Alan V. Hayes, Rustam Yevtukhov, Ira Reiss, Roger P. Fremgen, Adrian Celaru +5 more | 2007-02-27 |
| 7005782 | Charged particle beam extraction and formation apparatus | Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch | 2006-02-28 |
| 6774550 | Charged particle beam extraction and formation apparatus | Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch | 2004-08-10 |
| 6716322 | Method and apparatus for controlling film profiles on topographic features | Hari Hedge, Alan V. Hayes, Boris L. Druz, Adrian Devasahayam, Emmanuel Lakios | 2004-04-06 |
| 6590324 | Charged particle beam extraction and formation apparatus | Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch | 2003-07-08 |