Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6689254 | Sputtering apparatus with isolated coolant and sputtering target therefor | — | 2004-02-10 |
| 6623606 | Method and apparatus for sputter coating with variable target to substrate spacing | Israel A. Wagner | 2003-09-23 |
| 6464841 | Cathode having variable magnet configuration | — | 2002-10-15 |
| 6416635 | Method and apparatus for sputter coating with variable target to substrate spacing | Israel A. Wagner | 2002-07-09 |
| 6224724 | Physical vapor processing of a surface with non-uniformity compensation | Thomas J. Licata | 2001-05-01 |
| 6183523 | Apparatus for thermal control of variously sized articles in vacuum | Ira Reiss | 2001-02-06 |
| 6032419 | Vacuum processing apparatus with low particle generating vacuum seal | — | 2000-03-07 |
| 5925226 | Apparatus and method for clamping a substrate | Vaclav Jelinek | 1999-07-20 |
| 5879524 | Composite backing plate for a sputtering target | Ira Reiss | 1999-03-09 |
| 5804041 | Method and apparatus for forming a magnetically oriented thin film | — | 1998-09-08 |
| 5795448 | Magnetic device for rotating a substrate | Ira Reiss, Marian Zielinski, Swie-In Tan | 1998-08-18 |
| 5783048 | Sputtering cathode with uniformity compensation | — | 1998-07-21 |
| 5632869 | Method of pretexturing a cathode sputtering target and sputter coating an article therewith | Charles Nicholas Van Nutt | 1997-05-27 |
| 5620578 | Sputtering apparatus having an on board service module | — | 1997-04-15 |
| 5569361 | Method and apparatus for cooling a sputtering target | — | 1996-10-29 |
| 5562819 | Apparatus for trapping, signalling presence of and collecting debris in waterways | Richard R. Turner, Jr. | 1996-10-08 |
| 5490914 | High utilization sputtering target for cathode assembly | Corey Weiss | 1996-02-13 |
| 5474667 | Reduced stress sputtering target and method of manufacturing therefor | Tugrul Yasar, Bhola De, Jon Hsu | 1995-12-12 |
| 5449445 | Sputtering target with machine readable indicia | Frank M. Shinneman | 1995-09-12 |
| 5415753 | Stationary aperture plate for reactive sputter deposition | Israel A. Wagner | 1995-05-16 |
| 5409590 | Target cooling and support for magnetron sputter coating apparatus | Robert Hieronymi, Israel A. Wagner | 1995-04-25 |
| 5391281 | Plasma shaping plug for control of sputter etching | Robert Hieronymi | 1995-02-21 |
| 5366322 | Apparatus for containment of overflow and runoff water | — | 1994-11-22 |
| 5346601 | Sputter coating collimator with integral reactive gas distribution | Andrew H. Barada | 1994-09-13 |
| 5336386 | Target for cathode sputtering | Daniel R. Marx | 1994-08-09 |