Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10128083 | Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas | Boris L. Druz, Rustam Yevtukhov, Alan V. Hayes, Mathew Levoso, Peter I. Porshnev | 2018-11-13 |
| 6395146 | Sputtering assembly and target therefor | Gary D. Lutz | 2002-05-28 |
| 6299740 | Sputtering assembly and target therefor | Gary D. Lutz | 2001-10-09 |
| 5409590 | Target cooling and support for magnetron sputter coating apparatus | Steven Hurwitt, Israel A. Wagner | 1995-04-25 |
| 5391281 | Plasma shaping plug for control of sputter etching | Steven Hurwitt | 1995-02-21 |
| 5130005 | Magnetron sputter coating method and apparatus with rotating magnet cathode | Steven Hurwitt, Israel A. Wagner | 1992-07-14 |
| 5126028 | Sputter coating process control method and apparatus | Steven Hurwitt, Israel A. Wagner, Charles Nicholas Van Nutt, Richard C. Edwards, Donald A. Messina | 1992-06-30 |
| 5080772 | Method of improving ion flux distribution uniformity on a substrate | Steven Hurwitt, Israel A. Wagner | 1992-01-14 |
| 4957605 | Method and apparatus for sputter coating stepped wafers | Steven Hurwitt, Israel A. Wagner, Charles Nicholas Van Nutt | 1990-09-18 |
| 4428816 | Focusing magnetron sputtering apparatus | Walter H. Class, Steven Hurwitt | 1984-01-31 |