Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7728293 | Structures and methods for measuring beam angle in an ion implanter | Leonard M. Rubin, Ivan L. Berry, III | 2010-06-01 |
| 4842703 | Magnetron cathode and method for sputter coating | James F. Smith | 1989-06-27 |
| 4581118 | Shaped field magnetron electrode | Steven Hurwitt, Lin I | 1986-04-08 |
| 4525262 | Magnetron reactive bias sputtering method and apparatus | Steven Hurwitt, Michael Hill | 1985-06-25 |
| 4472259 | Focusing magnetron sputtering apparatus | Arnold J. Aronson, Steven Hurwitt, Michael Hill | 1984-09-18 |
| 4428816 | Focusing magnetron sputtering apparatus | Robert Hieronymi, Steven Hurwitt | 1984-01-31 |
| 4422896 | Magnetically enhanced plasma process and apparatus | Steven Hurwitt, Michael Hill, Marvin Hutt | 1983-12-27 |
| 4198283 | Magnetron sputtering target and cathode assembly | George J. Unterkofler, Steven Hurwitt | 1980-04-15 |