Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7728293 | Structures and methods for measuring beam angle in an ion implanter | Ivan L. Berry, III, Walter H. Class | 2010-06-01 |
| 7714406 | Low-cost electrostatic clamp with fast de-clamp time | Marvin R. LaFontaine, Michael Pharand, Klaus Becker | 2010-05-11 |
| 6984832 | Beam angle control in a batch ion implantation system | Alfred Mike Halling | 2006-01-10 |
| 6255662 | Rutherford backscattering detection for use in Ion implantation | Shaun Dean Wilson, Yuri Erokhin | 2001-07-03 |