Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10395889 | In situ beam current monitoring and control in scanned ion implantation systems | — | 2019-08-27 |
| 6984832 | Beam angle control in a batch ion implantation system | Leonard M. Rubin | 2006-01-10 |
| 6600163 | In-process wafer charge monitor and control system for ion implanter | — | 2003-07-29 |
| 5998798 | Ion dosage measurement apparatus for an ion beam implanter and method | Wade A. Krull | 1999-12-07 |