MP

Michael Pharand

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
Overall (All Time): #3,288,171 of 4,157,543Top 80%
1
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7714406 Low-cost electrostatic clamp with fast de-clamp time Marvin R. LaFontaine, Leonard M. Rubin, Klaus Becker 2010-05-11