Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6244931 | Buffer station on CMP system | Jay D. Pinson, II, Arulkumar Shanmugasundram, Rodney Lum | 2001-06-12 |
| 5174875 | Method of enhancing the performance of a magnetron sputtering target | Steven Hurwitt, Charles Nicholas Van Nutt | 1992-12-29 |
| 4994162 | Planarization method | Karl J. Armstrong, Jon A. Roberts | 1991-02-19 |
| 4472259 | Focusing magnetron sputtering apparatus | Walter H. Class, Steven Hurwitt, Michael Hill | 1984-09-18 |