Issued Patents All Time
Showing 25 most recent of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450509 | Inductive plasma source with metallic shower head using b-field concentrator | Canfeng Lai, Jeffrey Tobin, Jose Antonio Marin | 2022-09-20 |
| 10529541 | Inductive plasma source with metallic shower head using B-field concentrator | Canfeng Lai, Jeffrey Tobin, Jose Antonio Marin | 2020-01-07 |
| 10233538 | Demagnetization of magnetic media by C doping for HDD patterned media application | Martin A. Hilkene, Roman Gouk, Matthew D. Scotney-Castle | 2019-03-19 |
| 10128083 | Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas | Boris L. Druz, Rustam Yevtukhov, Robert Hieronymi, Alan V. Hayes, Mathew Levoso | 2018-11-13 |
| 10014164 | Ion beam materials processing system with grid short clearing system for gridded ion beam source | Boris L. Druz, Rustam Yevtukhov, Rhodri Elliott, James M. Best, Jr. | 2018-07-03 |
| 9646642 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee +2 more | 2017-05-09 |
| 9478437 | Methods for repairing low-k dielectrics using carbon plasma immersion | Daping Yao | 2016-10-25 |
| 9376746 | Demagnetization of magnetic media by C doping for HDD patterned media application | Martin A. Hilkene, Roman Gouk, Matthew D. Scotney-Castle | 2016-06-28 |
| 8900405 | Plasma immersion ion implantation reactor with extended cathode process ring | Majeed A. Foad, Kartik Ramaswamy, Biagio Gallo, Hiroji Hanawa, Andrew Nguyen +2 more | 2014-12-02 |
| 8802522 | Methods to adjust threshold voltage in semiconductor devices | Michael G. Ward, Igor Peidous, Sunny Chiang, Yen B. Ta, Andrew Darlak +1 more | 2014-08-12 |
| 8658242 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee +2 more | 2014-02-25 |
| 8642128 | Enhanced scavenging of residual fluorine radicals using silicon coating on process chamber walls | Dongwon Choi, Dong-Hyung LEE, Tze Wing Poon, Manoj Vellaikal, Majeed A. Foad | 2014-02-04 |
| 8586952 | Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications | Martin A. Hilkene, Matthew D. Scotney-Castle, Roman Gouk, Steven Verhaverbeke | 2013-11-19 |
| 8501605 | Methods and apparatus for conformal doping | Kartik Santhanam, Martin A. Hilkene, Manoj Vellaikal, Mark R. Lee, Matthew D. Scotney-Castle | 2013-08-06 |
| 8492177 | Methods for quantitative measurement of a plasma immersion process | Daping Yao, Martin A. Hilkene, Matthew D. Scotney-Castle, Manoj Vellaikal | 2013-07-23 |
| 8354035 | Method for removing implanted photo resist from hard disk drive substrates | Martin A. Hilkene, Majeed A. Foad, Matthew D. Scotney-Castle, Roman Gouk, Steven Verhaverbeke | 2013-01-15 |
| 8288257 | Doping profile modification in P3I process | Matthew D. Scotney-Castle, Majeed A. Foad | 2012-10-16 |
| 8273624 | Plasma immersed ion implantation process using balanced etch-deposition process | Majeed A. Foad | 2012-09-25 |
| 8129261 | Conformal doping in P3I chamber | Matthew D. Scotney-Castle, Majeed A. Foad | 2012-03-06 |
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Martin A. Hilkene, Matthew D. Scotney-Castle +2 more | 2011-08-23 |
| 7968401 | Reducing photoresist layer degradation in plasma immersion ion implantation | Martin A. Hilkene, Kartik Santhanam, Yen B. Ta, Majeed A. Foad | 2011-06-28 |
| 7970483 | Methods and apparatus for improving operation of an electronic device manufacturing system | Sebastien Raoux, Mark W. Curry, Allen Fox | 2011-06-28 |
| 7838399 | Plasma immersed ion implantation process using balanced etch-deposition process | Majeed A. Foad | 2010-11-23 |
| 7723219 | Plasma immersion ion implantation process with reduced polysilicon gate loss and reduced particle deposition | Kartik Santhanam, Manoj Vallaikal, Majeed A. Foad | 2010-05-25 |
| 7674723 | Plasma immersion ion implantation using an electrode with edge-effect suppression by a downwardly curving edge | Majeed A. Foad | 2010-03-09 |