Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8802522 | Methods to adjust threshold voltage in semiconductor devices | Michael G. Ward, Igor Peidous, Sunny Chiang, Andrew Darlak, Peter I. Porshnev +1 more | 2014-08-12 |
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Martin A. Hilkene, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2011-08-23 |
| 7968401 | Reducing photoresist layer degradation in plasma immersion ion implantation | Martin A. Hilkene, Kartik Santhanam, Peter I. Porshnev, Majeed A. Foad | 2011-06-28 |
| 7659184 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Martin A. Hilkene, Matthew D. Scotney-Castle, Canfeng Lai +2 more | 2010-02-09 |