Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6183615 | Transport system for wafer processing line | Tugrul Yasar, Rodney L. Robison, Daniel Deyo | 2001-02-06 |
| 5944857 | Multiple single-wafer loadlock wafer processing apparatus and loading and unloading method therefor | Richard C. Edwards | 1999-08-31 |
| 5795448 | Magnetic device for rotating a substrate | Steven Hurwitt, Ira Reiss, Swie-In Tan | 1998-08-18 |