Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7744735 | Ionized PVD with sequential deposition and etching | Rodney L. Robison, Jacques Faguet, Bruce Gittleman, Frank M. Cerio, Jr., Jozef Brcka | 2010-06-29 |
| 6755945 | Ionized PVD with sequential deposition and etching | Glyn Reynolds, Frank M. Cerio, Jr., Bruce Gittleman, Michael Grapperhaus, Rodney L. Robison | 2004-06-29 |
| 6730605 | Redistribution of copper deposited films | Chantal Arena-Foster, Robert F. Foster, Joseph T. Hillman, Thomas J. Licata | 2004-05-04 |
| 6652711 | Inductively-coupled plasma processing system | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds +1 more | 2003-11-25 |
| 6635569 | Method of passivating and stabilizing a Ti-PECVD process chamber and combined Ti-PECVD/TiN-CVD processing method and apparatus | Michael S. Ameen, Joseph T. Hillman, Gert Leusink, Michael G. Ward | 2003-10-21 |
| 6632737 | Method for enhancing the adhesion of a barrier layer to a dielectric | Joseph T. Hillman, Richard Westhoff | 2003-10-14 |
| 6548112 | Apparatus and method for delivery of precursor vapor from low vapor pressure liquid sources to a CVD chamber | Joseph T. Hillman, Kenichi Kubo, Vincent Vezin, Hideaki Yamasaki, Yasuhiko Kojima +2 more | 2003-04-15 |
| 6417626 | Immersed inductively—coupled plasma source | Jozef Brcka, John Drewery, Michael Grapperhaus, Gerrit J. Leusink, Glyn Reynolds +1 more | 2002-07-09 |
| 6302057 | Apparatus and method for electrically isolating an electrode in a PECVD process chamber | Gerrit J. Leusink, Michael G. Ward, Tayler Bao, Jerry Yeh, Joseph T. Hillman | 2001-10-16 |
| 6183615 | Transport system for wafer processing line | Rodney L. Robison, Daniel Deyo, Marian Zielinski | 2001-02-06 |
| 5958134 | Process equipment with simultaneous or sequential deposition and etching capabilities | Ira Reiss, Subhadra Gupta, Rajendrapura Seetharamaiya Krishnaswamy, Israel A. Wagner | 1999-09-28 |
| 5474667 | Reduced stress sputtering target and method of manufacturing therefor | Steven Hurwitt, Bhola De, Jon Hsu | 1995-12-12 |
| 5408322 | Self aligning in-situ ellipsometer and method of using for process monitoring | Jon Hsu, Bhola De, Rodney L. Robison | 1995-04-18 |
| 5105529 | Process for airborne monolithic ferrite recording head with glass-protected self-aligned, machined track | Robert T. Sturrock, Harry P. Harnischfeger | 1992-04-21 |
| 5072322 | Monolithic ferrite recording head with glass-protected, self-aligned, machined track | Robert T. Sturrock, Harry P. Harnischfeger | 1991-12-10 |