Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7044662 | Developing photoresist with supercritical fluid and developer | Allan Awtrey, Nicholas Alan Ryza, Paul Schilling | 2006-05-16 |
| 6928746 | Drying resist with a solvent bath and supercritical CO2 | Allan Awtrey, Nicholas Alan Ryza, Paul Schilling | 2005-08-16 |
| 6924086 | Developing photoresist with supercritical fluid and developer | Allan Awtrey, Nicholas Alan Ryza, Paul Schilling | 2005-08-02 |
| 6730605 | Redistribution of copper deposited films | Robert F. Foster, Joseph T. Hillman, Thomas J. Licata, Tugrul Yasar | 2004-05-04 |
| 6440494 | In-situ source synthesis for metal CVD | — | 2002-08-27 |