Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7399708 | Method of treating a composite spin-on glass/anti-reflective material prior to cleaning | — | 2008-07-15 |
| 7270941 | Method of passivating of low dielectric materials in wafer processing | Dorel I. Toma | 2007-09-18 |
| 7208411 | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module | Maximilian A. Biberger | 2007-04-24 |
| 7169540 | Method of treatment of porous dielectric films to reduce damage during cleaning | — | 2007-01-30 |
| 7044662 | Developing photoresist with supercritical fluid and developer | Chantal Arena-Foster, Allan Awtrey, Nicholas Alan Ryza | 2006-05-16 |
| 6928746 | Drying resist with a solvent bath and supercritical CO2 | Chantal Arena-Foster, Allan Awtrey, Nicholas Alan Ryza | 2005-08-16 |
| 6924086 | Developing photoresist with supercritical fluid and developer | Chantal Arena-Foster, Allan Awtrey, Nicholas Alan Ryza | 2005-08-02 |
| 6890853 | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module | Maximilian A. Biberger | 2005-05-10 |
| 6610114 | Oxidizing polishing slurries for low dielectric constant materials | Dan Towery, Neil H. Hendricks, Tian-An Chen | 2003-08-26 |
| 6500605 | Removal of photoresist and residue from substrate using supercritical carbon dioxide process | William H. Mullee, Maximilian A. Biberger | 2002-12-31 |
| 6270395 | Oxidizing polishing slurries for low dielectric constant materials | Daniel Towery, Neil H. Hendricks, Tian-An Chen | 2001-08-07 |
| 6124421 | Poly(arylene ether) compositions and methods of manufacture thereof | Kreisler Lau, Tian-An Chen, Boris Korolev, Emma Brouk, Heike Thompson | 2000-09-26 |