Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10068765 | Multi-step system and method for curing a dielectric film | Junjun Liu, Eric M. Lee | 2018-09-04 |
| 9443725 | Multi-step system and method for curing a dielectric film | Junjun Liu, Eric M. Lee | 2016-09-13 |
| 9017933 | Method for integrating low-k dielectrics | Junjun Liu, Hongyu Yue | 2015-04-28 |
| 8956457 | Thermal processing system for curing dielectric films | Eric M. Lee, Junjun Liu | 2015-02-17 |
| 8895942 | Dielectric treatment module using scanning IR radiation source | Junjun Liu, Jacques Faguet, Eric M. Lee, Hongyu Yue | 2014-11-25 |
| 8444848 | Electrochemical substrate slicing using electromagnetic wave excitation | Hongyu Yue, Junjun Liu | 2013-05-21 |
| 8242460 | Ultraviolet treatment apparatus | Hongyu Yue, Junjun Liu, Jacques Faguet | 2012-08-14 |
| 8039049 | Treatment of low dielectric constant films using a batch processing system | Eric M. Lee | 2011-10-18 |
| 7977256 | Method for removing a pore-generating material from an uncured low-k dielectric film | Junjun Liu, Eric M. Lee | 2011-07-12 |
| 7901743 | Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system | Eric M. Lee | 2011-03-08 |
| 7858533 | Method for curing a porous low dielectric constant dielectric film | Junjun Liu, Eric M. Lee | 2010-12-28 |
| 7855123 | Method of integrating an air gap structure with a substrate | Eric M. Lee, Junjun Liu | 2010-12-21 |
| 7829268 | Method for air gap formation using UV-decomposable materials | Junjun Liu | 2010-11-09 |
| 7807213 | Method and system for characterizing porous materials | Jianhong Zhu | 2010-10-05 |
| 7666754 | Method and system for forming an air gap structure | Junjun Liu | 2010-02-23 |
| 7553769 | Method for treating a dielectric film | Jianhong Zhu, Kazuhiro Hamamoto | 2009-06-30 |
| 7405168 | Plural treatment step process for treating dielectric films | Eric M. Lee | 2008-07-29 |
| 7345000 | Method and system for treating a dielectric film | Robert Matthew Kevwitch, Brandon Hansen, Jianhong Zhu | 2008-03-18 |
| 7270941 | Method of passivating of low dielectric materials in wafer processing | Paul Schilling | 2007-09-18 |
| 7238382 | Method and system for characterizing porous materials | Jianhong Zhu | 2007-07-03 |
| 7199046 | Structure comprising tunable anti-reflective coating and method of forming thereof | Jeffrey T. Wetzel, David C. Wang, Eric M. Lee | 2007-04-03 |
| 7115993 | Structure comprising amorphous carbon film and method of forming thereof | Jeffrey T. Wetzel, David C. Wang, Eric M. Lee | 2006-10-03 |