Issued Patents All Time
Showing 1–25 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12315701 | Film forming apparatus | — | 2025-05-27 |
| 12170217 | Substrate processing apparatus and abnormality detection method | Hiroaki Chihaya, Einstein Noel Abarra, Tetsuya Miyashita | 2024-12-17 |
| 11551918 | Film forming apparatus | Kenichi Imakita, Atsushi Gomi, Hiroyuki Yokohara, Hiroshi Sone | 2023-01-10 |
| 10309005 | Deposition device and deposition method | Hiroshi Sone, Atsushi Gomi, Kanto Nakamura, Toru Kitada, Yasunobu Suzuki +6 more | 2019-06-04 |
| 9567667 | Dual-target sputter deposition with controlled phase difference between target powers | Shinji Furukawa, Naoki Watanabe, Hiroshi Miki, Tooru KITADA | 2017-02-14 |
| 9012551 | Rubber composition and molded rubber products | Katsuaki Sasaki, Shohei Fukama, Takashi Kaneike | 2015-04-21 |
| 8900991 | Film forming method and storage medium | Shuji AZUMO | 2014-12-02 |
| 8834142 | Fluidized bed granulator | Takahiro Yanagawa | 2014-09-16 |
| 8721846 | Method of forming film, film forming apparatus and storage medium | Naoki Yoshii | 2014-05-13 |
| 8697572 | Method for forming Cu film and storage medium | Kenji Hiwa | 2014-04-15 |
| 8211500 | Copper film deposition method | Naoki Yoshii | 2012-07-03 |
| 8207061 | Semiconductor device manufacturing method using valve metal and nitride of valve metal | Taro Ikeda | 2012-06-26 |
| 8197729 | Method of granulation with a fluidized bed granulator | Takahiro Yanagawa | 2012-06-12 |
| 8133811 | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus, computer program and storage medium | Taro Ikeda, Tatsuo Hatano | 2012-03-13 |
| 8129271 | Film forming method, film forming apparatus and storage medium | Taro Ikeda, Tatsuo Hatano | 2012-03-06 |
| 8075698 | Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing | Hiroshi Kannan, Tadahiro Ishizaka, Yasuhiro Oshima, Takashi Shigeoka | 2011-12-13 |
| 7846839 | Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording medium | Naoki Yoshii | 2010-12-07 |
| 7827932 | Vaporizer and processor | Tomohisa Hoshino | 2010-11-09 |
| 7815874 | Reactor | Kenji Sakai | 2010-10-19 |
| 7763215 | Reactor having detachably fixed tubesheet plate member | Kenji Sakai | 2010-07-27 |
| 7717061 | Gas switching mechanism for plasma processing apparatus | Tadahiro Ishizaka, Naoki Yoshii, Kohei Kawamura, Yukio Fukuda, Takashi Shigeoka +3 more | 2010-05-18 |
| 7699945 | Substrate treatment method and film forming method, film forming apparatus, and computer program | Naoki Yoshii, Koumei Matsuzawa | 2010-04-20 |
| 7670753 | Lithographic printing plate precursor | — | 2010-03-02 |
| 7582795 | Apparatus for synthesizing urea and method for revamping the same | — | 2009-09-01 |
| 7579502 | Apparatus for synthesizing urea | — | 2009-08-25 |