Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11225708 | Plasma spraying device and method for manufacturing battery electrode | Yoshiyuki Kobayashi, Katsuji Kadosawa, Kimitomo Kaji | 2022-01-18 |
| 8822263 | Epitaxial growth method of a zinc oxide based semiconductor layer, epitaxial crystal structure, epitaxial crystal growth apparatus, and semiconductor device | Akinori Koukitu, Yoshinao Kumagai, Tetsuo Fujii | 2014-09-02 |
| 8721846 | Method of forming film, film forming apparatus and storage medium | Yasuhiko Kojima | 2014-05-13 |
| 8211500 | Copper film deposition method | Yasuhiko Kojima | 2012-07-03 |
| 7887670 | Gas introducing mechanism and processing apparatus for processing object to be processed | Kenjiro Koizumi | 2011-02-15 |
| 7846839 | Film forming method, semiconductor device manufacturing method, semiconductor device, program and recording medium | Yasuhiko Kojima | 2010-12-07 |
| 7717061 | Gas switching mechanism for plasma processing apparatus | Tadahiro Ishizaka, Kohei Kawamura, Yukio Fukuda, Takashi Shigeoka, Yasuhiko Kojima +3 more | 2010-05-18 |
| 7699945 | Substrate treatment method and film forming method, film forming apparatus, and computer program | Koumei Matsuzawa, Yasuhiko Kojima | 2010-04-20 |