Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7699945 | Substrate treatment method and film forming method, film forming apparatus, and computer program | Naoki Yoshii, Yasuhiko Kojima | 2010-04-20 |
| 7456109 | Method for cleaning substrate processing chamber | Hideaki Yamasaki, Kazuhito Nakamura, Tsukasa Matsuda, Yumiko Kawano | 2008-11-25 |
| 7063871 | CVD process capable of reducing incubation time | Hideaki Yamasaki, Tatsuo Hatano, Tsukasa Matsuda, Taro Ikeda, Kazuhito Nakamura +2 more | 2006-06-20 |