Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10896891 | Semiconductor device | Yu Suzuki, Shoko Kikuchi, Merii Inaba, Jun MURAKAMI, Hiroshi Inagaki +1 more | 2021-01-19 |
| 8907318 | Resistance change memory | Takeshi Sonehara, Takayuki Okamura, Masaki Kondo | 2014-12-09 |
| 8759806 | Semiconductor memory device | Takeshi Yamaguchi, Hirofumi Inoue, Reika Ichihara, Takayuki Tsukamoto, Katsuyuki Sekine +1 more | 2014-06-24 |
| 8576606 | Nonvolatile semiconductor memory device | Tetsuji Kunitake, Takayuki Tsukamoto, Hironori Wakai, Hisashi Kato | 2013-11-05 |
| 8075698 | Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing | Hiroshi Kannan, Tadahiro Ishizaka, Yasuhiko Kojima, Yasuhiro Oshima | 2011-12-13 |
| 7717061 | Gas switching mechanism for plasma processing apparatus | Tadahiro Ishizaka, Naoki Yoshii, Kohei Kawamura, Yukio Fukuda, Yasuhiko Kojima +3 more | 2010-05-18 |
| 6891131 | Thermal processing system | Takeshi Sakuma, Yicheng Li | 2005-05-10 |
| 6876816 | Heating device, heat treatment apparatus having the heating device and method for controlling heat treatment | Takeshi Sakuma | 2005-04-05 |
| 6860634 | Temperature measuring method, heat treating device and method, computer program, and radiation thermometer | — | 2005-03-01 |
| 6825615 | Lamp having a high-reflectance film for improving directivity of light and heat treatment apparatus having such a lamp | — | 2004-11-30 |
| 6641302 | Thermal process apparatus for a semiconductor substrate | Yicheng Li, Takeshi Sakuma | 2003-11-04 |
| 6534749 | Thermal process apparatus for measuring accurate temperature by a radiation thermometer | — | 2003-03-18 |
| 6488407 | Radiation temperature measuring method and radiation temperature measuring system | Masayuki Kitamura, Eisuke Morisaki, Nobuaki Takahashi | 2002-12-03 |
| 6479801 | Temperature measuring method, temperature control method and processing apparatus | Takeshi Sakuma | 2002-11-12 |
| 6467952 | Virtual blackbody radiation system and radiation temperature measuring system | Eisuke Morisaki, Masayuki Kitamura, Nobuaki Takahashi | 2002-10-22 |
| 6437290 | Heat treatment apparatus having a thin light-transmitting window | ShouQian Shao, Yicheng Li, Takeshi Sakuma | 2002-08-20 |