Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6302057 | Apparatus and method for electrically isolating an electrode in a PECVD process chamber | Gerrit J. Leusink, Michael G. Ward, Jerry Yeh, Joseph T. Hillman, Tugrul Yasar | 2001-10-16 |