Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10082461 | Optical metrology with purged reference chip | Andrew Klassen, Andrew J. Hazelton, Todd M. Petit, Chuan Sheng Tu | 2018-09-25 |
| 7169016 | Chemical mechanical polishing end point detection apparatus and method | Takehiko Ueda | 2007-01-30 |
| 5346601 | Sputter coating collimator with integral reactive gas distribution | Steven Hurwitt | 1994-09-13 |
| 4953388 | Air gauge sensor | — | 1990-09-04 |